ERROR CODE : 496 Invalid license file

ERROR CODE : 496 Invalid license file

Hello,
I've got installed OpManger v12.2, central and probes server. I have applied license file to the central server.
It is very fresh installation. Today I was trying to do something on the probe server, and the service has just crashed, now I can't start it, as there is a message about invalid license file...
Starting Server from location: D:\ManageEngine\OpManagerProbe
ERROR CODE : 496
Invalid License File 
Any suggestion what can be wrong with the installation?
                New to ADManager Plus?

                  New to ADSelfService Plus?